Assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component

ABSTRACT

In one embodiment, the invention provides a test assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component. The assembly comprises a contactor assembly to interconnect with the test component, a probe assembly to mechanically support the contactor assembly and electrically connect the contactor assembly to the testing machine, and a clamping mechanism comprising a first clamping member and a second clamping member, the clamping members being urged together to exert a clamping force to deform contactor bumps of an electrical connection between the probe assembly and the contactor assembly.

CROSS-REFERENCE TO OTHER APPLICATIONS

This application is a division of Ser. No. 10/912,785, filed Aug. 6,2004, now U.S. Pat. No. 7,046,022 which is a division of Ser. No.10/197,104, filed Jul. 16, 2002, now U.S. Pat. No. 6,867,608.

FIELD OF THE INVENTION

This invention relates to test equipment. In particular, it relates totest equipment for testing electrical circuits including integratedcircuits.

BACKGROUND

When fabrication of electronic devices, such as computer processors andmemories, have been completed, the electronic devices are subjected toburn-in and electrical testing in order to identify and eliminatedefective devices before shipment. The term “burn-in” relates tooperation of an integrated circuit at a predetermined temperature ortemperature profile, typically an elevated temperature in an oven.Certain operating electrical bias levels and/or signals are supplied tothe electronic devices while they are at the elevated temperature. Theuse of the elevated temperature accelerates stress to which the devicesare subjected during burn-in, so that marginal devices that wouldotherwise fail shortly after being placed in service fail duringburn-in, and are therefore not shipped.

Test equipment for burn-in testing of electrical circuits generallycomprise a connection arrangement for electrically connecting anelectrical circuit to be tested such as an integrated circuit on a waferor test substrate, to a test probe circuit.

SUMMARY

In one embodiment, the invention provides a test assembly forelectrically connecting a test component to a testing machine fortesting electrical circuits on the test component. The assemblycomprises a contactor assembly to interconnect with the test component,a probe assembly to mechanically support the contactor assembly andelectrically connect the contactor assembly to the testing machine, anda clamping mechanism comprising a first clamping member and a secondclamping member, the clamping members being urged together to exert aclamping force to deform conductive bumps of an electrical connectionbetween the probe assembly and the contactor assembly.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention is described by way of example with reference to theaccompanying drawings wherein:

FIG. 1 is a block diagram of an interposer, an electrical contactor anda wafer comprising circuits to be tested;

FIG. 2 is a block diagram of a contactor assembly in accordance with oneembodiment of the invention;

FIG. 3 is a block diagram illustrating a stage in the formation of thecontactor assembly of FIG. 2;

FIG. 4 is a perspective view of a vacuum plate connected to a ring, inaccordance with one embodiment of the invention;

FIG. 5 is a top plan view of the vacuum plate and ring of FIG. 4;

FIG. 6 is a section on 6-6 in FIG. 5;

FIG. 7 is a block diagram illustrating how a ring and interposer seatedtherein may be aligned with a contactor, in accordance with oneembodiment of the invention;

FIG. 8 is a perspective view of an alignment machine in accordance withone embodiment of the invention;

FIG. 9 is an end view of the alignment machine shown in FIG. 8 of thedrawings with a microscope mounted thereon;

FIG. 10 is a perspective view of the alignment machine of FIG. 8 mountedon a probe plate;

FIG. 11 is an end view of FIG. 10;

FIG. 12A is a block diagram of the probe plate showing a flexibleconnector in accordance with another embodiment of the inventionelectrically connecting a contactor assembly to the probe plate;

FIG. 12B is a block diagram of a probe plate showing a flexibleconnector in accordance with one embodiment of the inventionelectrically connecting a contactor assembly to the probe plate;

FIG. 13B is a block diagram of an end of the flexible connector of FIG.13A;

FIG. 14 shows an arrangement of electrical contact elements on anelectrical contactor in accordance with one embodiment of the invention;

FIGS. 15 and 16 are block diagrams showing different stages in theformation of an electrical connection between the flexible electricalconnector and the electrical contactor of FIG. 12;

FIG. 17 is a block diagram of the probe plate of FIG. 12 wherein withoutthe electrical connector and showing fiducial markings on the contactorassembly; and

FIG. 18 is a block diagram of a test probe assembly in accordance withone embodiment of the invention.

DETAILED DESCRIPTION

FIG. 1 of the accompanying drawings illustrates an interposer 10 and anelectrical contactor 26 which together form a contactor assembly,according to an embodiment of the invention, used to test electricalcircuits, for example, on a wafer 32.

As will be seen from FIG. 1, the interposer 10 includes a substratehaving a first side 12 and a second side 14. The interposer 10 includesa number of electrical terminals 16 on the first side 12. The interposer10 also includes resilient interconnection elements in the form ofinterconnection spring elements 18. Each interconnection spring element18 extends from an electrical terminal 16 on the side 12 and terminatesin a free end. The purpose of each interconnection spring elements 16 isto make good electrical contact with corresponding electrical terminalson the electrical contactor 26. In other embodiments, the resilientinterconnection elements include pogo pins and compliant conductivebumps.

The interposer 10 also has an interconnection spring element 20 on eachelectrical terminal 16 on side 14. The interconnection spring elements20 are similar to the interconnection spring elements 18 except that theinterconnection spring elements 20 are for making electrical contactwith corresponding electrical terminals on the wafer 32.

The interposer also includes mechanical alignment stops 22 on the sides12 and 14 to prevent overtravel of the interconnection spring elements18 and to prevent the interposer from touching certain areas of thewafer 32.

The electrical contactor 26 includes a contactor substrate whichincludes a side 28. Electrical contactor 26 also includes electricalterminals 30 on the side 28.

The wafer 32 is shown to include a side 34 which has the electricalcircuits to be tested. The wafer 32 has electrical terminals 36 on theside 34 whereby electrical connection to the electrical circuits may bemade.

FIG. 2 of the drawings shows a contactor assembly 40 in accordance withone embodiment of the invention. The assembly 40 includes an interposer10 and a retaining component in the form of a ring 42. The interposer 10is secured or held in a predetermined or aligned position relative tothe electrical contactor 26 by a ring 42. It will be seen that in thepredetermined or aligned position, each interconnection spring element18 has been deformed against a spring force thereof to make electricalcontact with a corresponding electrical terminal 30 of electricalcontactor 26. The predetermined position is reached by moving the ring42 and the interposer 10 seated therein until the alignment stops 22bear against the side 28 of the electrical contactor 26. In otherembodiments, the predetermined position is reached when sufficientpressure is exerted by the interconnection spring elements 18 (or thepogo pins or compliant conductive bumps in other embodiments) to keepthe contactor 26 in place. The stops 22 are thus optional. A spacingbetween the interposer 10 and the electrical contactor 26 is such thateach of the interconnection spring elements 18 is under compression.

The ring 42 is formed with a recessed surface 44 which defines a seatfor the interposer 10. The ring 42 has a flat flange-like face 46 whichbears against side 28 of electrical contactor 26. The ring 42 is securedto the electrical contactor 26 by means of fasteners 43, for examplescrews, extending through screw holes 48 (see FIG. 4). The holes 48 aredimensioned to accommodate the fasteners 43 with some degree of play topermit alignment of fiducial markings on the interposer 10 and contactor26, respectively.

FIG. 3 of the drawings shows a first stage in the formation of thecontactor assembly 40. Referring to FIG. 3, a vacuum plate 50 isreleasably secured to a side of the ring 42 opposing face 46 to form asub-assembly 51. The vacuum plate 50 can be connected to a pump (notshown) by means of a coupling 54 and a hose 52 connected to the coupling54. In use, the pump creates a vacuum in a region 56 between the vacuumplate 50 the interposer 10. The vacuum retains interposer 10 against therecessed surface 44. As can be seen from FIGS. 4 and 5, the vacuum plate50 is shaped and dimensioned to provide access to the fasteners 43.

As can be seen from FIG. 6 which shows a sectional view throughsub-assembly 51 taken at 6-6 in FIG. 5, the interposer 10 seats snuglyin the ring 42.

FIG. 7 of the drawings shows a block diagram of how alignment of theinterposer 10 with the electrical contactor 26 is achieved. Theinterposer 10 is seated in the ring 42 and moved in an x, y, or Θdirection such that a fiducial marking 58 on the side 12 of theinterposer 10 is aligned with a fiducial marking 60 on the side 28 ofthe electrical contactor 26. Once the fiducial marking 58 is alignedwith the fiducial marking 60, the ring 42 together with the interposer10 is displaced in a z direction so that the ring 42 makes contact withthe electrical contactor 26. A screw 43 located in hole 48 is thenscrew-threaded into a complementary threaded socket 68 formed inelectrical contactor 26. The fiducial markings 58, 60 allow foralignment for the electrical terminals 30 on the electrical contactor 26with the ends of the interconnection spring elements 18 without havingto take an image of the interconnection spring elements 18. Tolerancesin the position of each interconnection spring element in the x-y planeor the angle at which it projects from the x-y plane do not effect thealignment process. The mechanical stops 22 on the side 18 of theinterposer 10 may be used to limit movement of the interposer 10 towardsthe electrical contactor 26 when forming the assembly 40, such that eachof the interconnection spring elements 18 is under the desiredcompression.

FIG. 8 of the drawings shows a perspective view of an alignment machine70, in accordance with one embodiment of the invention, which may beused to align the ring 42 and interposer 10 combination with theelectrical contactor 26. The alignment machine 70 includes a base 72which is shaped and dimensioned to rest on a probe plate 152 which, inuse, houses the electrical contactor 26. The alignment machine 70 alsoincludes a raised platform or plate 74 which is secured to the base 72by means of mounting brackets 76. The platform 74 supports a carriage78. The carriage 78 is seen in FIG. 9 of the drawings which shows a sideview of the alignment machine 70. The carriage 78 is secured to anunderside of the platform 74 by means of a mounting arrangementcomprising angle brackets 88 and horizontal springs 90. The anglebrackets 88 are secured to the platform 74 and provide an anchor for oneend of the springs 90, the other end of the springs 90 being secured toa floating plate 80 of carriage 78 as can be seen in FIG. 9 of thedrawings.

The carriage 78 further includes ring holders 82 which are secured tothe floating plate 80 of vertical members 84 extending between the ringholders mounting plate 82 and the floating plate 80.

Roller bearings 94 disposed between the platform 74 and the floatingplate 80 allow for slidable displacement of the floating plate 80relative to the platform 74. Vertical springs 95 urge the floating plate80 into contact with roller bearings 94. It will be appreciated that thespring mounting arrangement of the floating plate 80 to the platform 74allows for movement of the floating plate 80 in an x-y plane. Suchmovement in the x y plane is controlled by means of an adjustmentmechanism which, in one embodiment, includes micrometers 96, 98, and100, each of which can be operated to urge a tip thereof to bear againstan edge of the floating plate 80 thereby to cause the displacement offloating plate 80. For example, as can be seen in FIG. 9 of thedrawings, a tip 98.1 of the micrometer 98 may be displaced in a ydirection to bear against an edge of the floating plate 80 thereby tocause the floating plate 80 to be displaced in the y direction. Becausethe ring holders 82 are rigidly connected to the floating plate 80,displacement of the floating plate 80 also causes correspondingdisplacement of the ring holders 82.

In use, the interposer 10 which is seated in the ring 42 by means of asuction force created with the aid of the vacuum plate 50 and a pump(not shown) is connected mechanically to the ring holders 82 of thecarriage 78. Thereafter, the alignment machine 70 is positioned on aprobe plate 152 as is shown in FIG. 10. In this position, the ring 42and the interposer 10 which is seated in the ring 42 is positioneddirectly over the electrical connector 26 which is seated in the probeplate 152.

A magnification system comprising a microscope 102 which includes ascope section 104 and a base 106 is secured on the platform 74 as can beseen in FIG. 9 of the drawings.

The microscope 102 magnifies the fiducial markings 58, 60 on theinterposer 10 and the electrical connector 26, respectively. Themicrometers 96, 98 and 100 may then be operated to move the carriage 78,which carries the ring 42 and the interposer 10 with it, so that theinterposer 10 may be positioned over the electrical connector 26 in apredetermined or aligned position in which the fiducial markings, 58, 60on the interposer 10 and the electrical contactor 26, respectively, arein alignment.

The alignment machine 70, further includes micrometer heads 108 whichmay be operated to move the carriage 78 in a z direction which causesthe interposer and ring combination to be displaced in the z directiontowards the electrical contactor 26. In use, displacement in the zdirection is continued until alignment the stops 22 contact the side 28of electrical contactor 26, or the desired z position is reached. Whenthis position is reached, the screws 43 are screwed into the sockets 68in the electrical contactor 26, thereby to secure the ring 42 and theinterposer 10 seated therein to the electrical contactor 26.

Once the ring 42 and the interposer 10 are secured to the electricalcontactor 26, the vacuum plate 50 and the alignment machine 70 areremoved. The probe plate 152 includes an external interface component164 comprising a plurality of electrical connectors in the form ofelectrical pins 166 as can be seen in FIG. 12. A flexible connector 110electrically connects the contactor assembly 40 to the interfacecomponent 164 which in turn is electrically connected to a burn-inchamber of a testing machine (not shown) via the pins 166.

The flexible connector 110 includes a flexible substrate 112 havingsides 112.1 and 112.2 as can be seen in FIG. 13A. Further, the flexiblesubstrate 112 has a first end 115 and a second end 116. Flexible lineconductors 114.1 and 114.2 are formed on the sides 112.1 and 112.2respectively, as can be seen in FIGS. 13A and 13B of the drawings. Eachflexible line conductor 114.1 has a first end which is electricallyconnected to the interface component 164 and a second end remote fromthe first end. Each flexible line conductor 114.1 includes a terminal atits second end comprising two conductive bumps 118.1 as can be seen inFIG. 13B of the drawings. Each flexible line conductor 114.2, likewise,has a first end which is electrically connected to the interfacecomponent 164 and a second end remote from the first end which isconnected by a via 113 extending though the substrate 112 to a terminalcomprising two conductive bumps 118.2 on the side 112.1. It will beappreciated that by having flexible line conductors on each side 112.1and 112.2 of the substrate 112 it is possible for the substrate 112 tocarry more line conductors 114.1 and 114.2.

The flexible connector 110 is sufficiently flexible so that it can foldonto itself without damage to the flexible substrate 112, and istypically made of a material such as polyimide. According to someembodiments, the flexible substrate 112 may have a thickness of 25.4microns or 49 microns, although a thickness of up to 125 microns isstill flexible in a sense that folding onto itself will still bepossible without damage to the flexible substrate 112.

Typically, the bumps 118.1, 118.2 are formed of gold and have a width ofabout 100 micrometers and a height of about 60 micrometers. Gold ispreferred as a material for the bumps 118 since it does not oxidize andis able to tolerate temperatures of between 150° C. to 350° C. Further,gold maintains its elasticity within a temperature range of between 180°C. to 240° C. The flexible connector 110 includes a layer 119 whichcovers the line conductors 114.1 and 114.2. The layer 119 is made of anon-conductive flexible material as can be seen in FIG. 15.

The flexible connector 110 is electrically connected to the rigidly,substantially unbendable electrical contactor 26 of the contactorassembly 40. For this purpose, the electrical contactor 26 has aplurality of electrical contact elements 120 that are compatible forelectrical connection to the conductive bumps 118.1 and 118.2 of theflexible connector 110. FIG. 15 shows a layout of the electrical contactelements 120 on the electrical contactor 26. Referring to FIG. 15, itwill be seen that the electrical contact elements 120 are generallyrectangular and are arranged in two rows 125. Each of the elements 120has a flat contact surface 120.1. The contact surfaces 120.1 of all theelectrical contactor elements 120 are in the same plane. In oneembodiment, each electrical contact element 120 has lateral dimensionsof 125 and 500 microns and a height of 30 microns. In this embodiment,the electrical contact elements 120 are spaced on a pitch of 100microns. The electrical contactor elements 120 are typically formed ofgold which provides a fairly robust connection with the conductor bumps118.1 and 118.2. The electrical connection between the flexibleconnector 110 and the electrical contactor 26 has a low profile and inone embodiment is only about 6 millimeters high.

FIG. 15 of the drawings shows a block diagram of a stage in theformation of the electrical connection between the flexible connector110 and the electrical contact elements 120.

Basically, in order to form the electrical connection between theflexible connector 110 and the electrical contactor 26, the second end116 of the flexible electrical connector 110 is clamped onto theelectrical contactor 26 using a clamp. The clamp comprises a firstclamping member in the form of an elongate bar 122 of a work hardenedmetal and a second clamping member which is defined by the electricalcontactor 26. A coefficient of thermal expansion of the metal bar 122 ismatched to a coefficient of thermal expansion of the electricalcontactor 26. In one embodiment, the coefficient of thermal expansion ofthe metal bar 122 is within 0.5 ppm/° C. of the coefficient of thermalexpansion of the electrical contactor 26.

The elongate metal bar 122, the flexible connector 110, and theelectrical contactor 26 have axially extending holes to receive afastening bolt 124 therein. A nut 126 mates with threads on the bolt 124and urges the conductive bumps 118.1 and 118.2 into contact with theelectrical contactor elements 120 to a position shown in FIG. 16 of thedrawings. The clamping force exerted by the fastening bolt 124 causesthe conductive bumps 118.1 and 118.2 to bear against the electricalcontactor elements 120 which results in an elastic and plasticdeformation of the conductive bumps 118.1 and 118.2. This ensures goodelectrical contact between the conductive bumps 118.1 and 118.2 and theelectrical contactor elements 120.

Because the fastening bolt 124, the metal bar 122 and the conductivebumps 118.1 and 118.2 may have different thermal coefficients, and dueto the high temperatures achieved during the burn-in testing, thefastening bolt 124 may lengthen during the burn-in testing. This resultsin a gap between a head 124.1, of the fastening bolt 124, and the metalbar 122.

It will be appreciated that such a gap will release the clamping forceexerted by the fastening bolt 124 on the flexible connector 110. Inorder to compensate for the tendency for such a gap to be created, anexpander member 128 of resilient material may be interposed orsandwiched between the elongate metal bar 122 and the flexible connector110 as can be seen in FIG. 16. The expander member 128, which iscompressed under the clamping force generated by tightening of thefastening bolt 124 and relaxes or expands if lengthening of thefastening bolt 124 occurs. Thus, the expander member 128 takes up anygap between the head 124.1 and the metal bar 122, thereby to maintainthe clamping force of the fastening bolt 124. The expander member is ofa material that is able to withstand the elevated temperatures within aburn-in chamber. Further, since a height of the conductive bumps 118.1and 118.2 may vary, the expander member 128 deforms the flexiblesubstrate 112, differentially to compensate for variations in the heightof the conductive bumps 118.1 and 118.2.

FIG. 12A shows another embodiment 110A of a flexible connector. Theflexible connector 110A is similar to the flexible connector 110, exceptthat each end thereof has conductive bumps similar to the bumps 118.1and 118.2. One end of the flexible connection 110A is clamped to theelectrical contactor 26 as described above and an opposite end of theflexible connector 110A is clamped, in a similar fashion, to a connector121 which carries electrical signals to and from the external interface164.

The contactor 26 includes fiducial markings 130 (as can be seen in FIG.17) to facilitate alignment of the conductive bumps 118 with theelectrical contactor elements 120 prior to clamping. The fiducialmarkings 130 are visible through the flexible connector 110. Theflexible connector 110 has complementary fiducial markings 132 (as canbe seen in FIG. 13B) which can then be aligned with the fiducialmarkings 130 on the contactor 26 to ensure alignment of the conductivebumps 118 with the contactor elements 120.

FIG. 18 of the drawings illustrates the components of test probeassembly 160 in accordance with one embodiment of the invention. Thetest probe assembly 150 includes a probe plate 152 and a chuck plate 154which together define a space therebetween for receiving a contactorassembly such as the contactor assembly 40 shown in FIG. 2 of thedrawings.

The chuck plate 154 has a pedestal 156 which provides support for thewafer 32. The probe plate 152 includes a piston 158 which isdisplaceable in a cylinder 160 by a hydraulic fluid which, in use, isintroduced into the chamber 160 through a hose 162 which is releasablyconnectable to the cylinder 160. The piston 158 is connected to anelectrical contactor 26 of the contactor assembly 40.

In use, air is introduced intro the chamber 160 through hose 162 to urgethe piston 158 to move in a z direction, thereby to displace thecontactor assembly 40 towards the chuck plate 154 until the mechanicalalignment stops 22 on the side 14 of the interposer 10 make contact withthe side 34 of the wafer 32. A resiliently deformable member in form ofan O-ring 163 positioned between the ring 42 and the chuck plate 154serves to limit or control how much displacement of the contactorassembly 40 is produced by movement of the piston 158. Thus, movement ofthe piston 158 does not require precise control. Further, the O-ring 163provides a seal between the ring 42 and the chuck plate 154. The O-ring163 allows for variations in which the faces 46 of the ring 42 may notbe on the same z-plane by cushioning the ring 42 as it is displacedtowards the chuck plate 154. In some embodiment, the O-ring 163 may bereplaced by springs which provide a reaction against movement of thepiston 158. Once the mechanical stops 22 of the side 14 of theinterposer 10 contact the side 34 of the wafer 32, the interconnectionspring elements are compressed thereby to achieve good electricalcontact between the interconnection spring elements 20 of the interposer10 and the electrical terminals 36 of the wafer 32. Thereafter, the hose162 is removed. The probe assembly 152 also includes a securingmechanism to releasably secure or fasten the chuck plate 154 to theprobe plate 152. The securing mechanism has not been shown in FIG. 12,but includes any suitably clamping arrangement such as the kinematiccouplings of U.S. Pat. No. 6,340,895 which is hereby incorporated byreference. The test probe assembly 150 is then inserted into a testburn-in chamber wherein the electrical connection pins 166 are receivedin complementary electrical sockets.

Although the present invention has been described with reference tospecific exemplary embodiments, it will be evident that the variousmodification and changes can be made to these embodiments withoutdeparting from the broader spirit of the invention as set forth in theclaims. Accordingly, the specification and drawings are to be regardedin an illustrative sense rather than in a restrictive sense.

1. A contactor assembly for electrically connecting an electrical testcomponent to a testing machine for testing the test component, thecontactor assembly comprising: a first test structure, the first teststructure comprising: a first plurality of electrical terminals; a firstplurality of resilient interconnection elements, each having a first endconnected to an electrical terminal of the first plurality of electricalterminals and a free end opposite the first end to electrically contactthe test component; and a second plurality of resilient interconnectionelements, each having a first end connected to an electrical terminal ofthe first plurality of electrical terminals and a free end opposite thefirst end to electrically contact a second plurality of electricalterminals; a second test structure, the second test structurecomprising: the second plurality of electrical terminals; and aplurality of electrical contact elements distant from the electricalterminals; a retaining component to secure the position of the firsttest structure to a relative position of the second test structure; andan electrical path bridging each electrical terminal with a respectiveone of the electrical contact elements, wherein each electrical contactelement has a body which defines a flat surface to provide support tomatching contactor elements when the matching contactor elements aredeformed under a clamping force.
 2. The contactor assembly of claim 1,wherein the resilient interconnection elements comprise springs.
 3. Thecontactor assembly of claim 1, wherein the second test structurecomprises a plurality of apertures formed therein to cooperate withclamping members to clamp the matching contactor elements.
 4. Thecontactor assembly of claim 3, wherein the second test structure furthercomprises fiducial markings to facilitate alignment of the electricalcontact elements with the matching contactor elements.